Defect inspection system

Details Defect inspection system Defect inspection system

2005-12-06

2005-12-06

Mehta, Bhavesh M. (Department: 2625)

Image analysis

Applications

Manufacturing or product inspection

C382S141000, C382S145000, C382S147000, C348S125000, C702S035000

Reexamination Certificate

active

06973209

ABSTRACT:
A defect inspection system is provided which comprises an image acquiring section for acquiring a two-dimensional image of a subject which is a processing target in a manufacturing process, a defect extracting section for extracting a defect by a defect extraction algorithm using a predetermined parameter for an image acquired by the image acquiring section, a displaying section for displaying an image of a defect of the subject extracted by the defect extracting section, a parameter adjusting section for adjusting the parameter in accordance with a defect extraction degree for the subject, and a quality judging section for judging the quality of the subject based on a defect information extracted by the defect extracting section.

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Official Action dated Mar. 15, 2002 issued in counterpart Singapore application No. SG 200104489-0, filed Nov. 28, 2000.

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