Pressure sensor

Details Pressure sensor Pressure sensor

2005-08-16

2005-08-16

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

06928878

ABSTRACT:
A pressure sensor including a movable component that is configured to move when the pressure sensor is exposed to differential pressure thereacross, and a pressure sensing component located on the movable component. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the movable component. The pressure sensor is configured such that leads can be coupled to the pressure sensing component and the pressure sensing component can output a signal via the leads, the signal being related to a pressure to which the pressure sensor is exposed.

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Statement by Applicant with Attachment A.
Eickhoff, M. et al., “Novel Sensor Applications of group-III nitrides,” Materials Research Society Symp. Proc., vol. 693, pp. 781-792 (2002).
Gaska, R. et al., “Piezoresistive effect in metal-semiconductor-metal structures on p-type GaN,” Applied Physics Letters, vol. 76, No. 26, pp. 3956-3958 (Jun. 26, 2000).
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