Method for manufacturing a thin film magnetic head

Details Method for manufacturing a thin film magnetic head Method for manufacturing a thin film magnetic head

2005-12-06

2005-12-06

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603070, C029S603130, C029S603140, C029S603160, C216S039000, C216S041000, C216S048000, C360S123090, C360S317000

Reexamination Certificate

active

06971156

ABSTRACT:
A thin film magnetic head capable of improving a high frequency response characteristic and the efficiency of the head, and reducing the manufacturing time, and a method of manufacturing the thin film magnetic head. After laminating a precursory layer for forming a coil pattern, a precursory layer for forming a separate layer, and a precursory layer for forming a coil pattern, these layers are continuously patterned with the use of a mask by etching to selectively form the coil pattern, the separate layer and the coil pattern in a batch process. The number of the manufacturing steps (the number of photolithography processes) is reduced compared with the case where the coil pattern, the separate layer, and the coil pattern are formed by plating in separate processes, so that a thin film coil comprising the coil patterns can be formed in a shorter time.

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patent: 07066211 (1995-03-01), None
“highly Sensitive Single Pole Head with Laminated Thin Film Coils”; Jiang, N.; Muraoka, H.; Nakamura, Y.; Magnetics, IEEE Transactions on , vol. 31 Issue 6 , Nov. 1995; pp.: 2715-2717.

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