Thin film capacitor and fabrication method thereof

Details Thin film capacitor and fabrication method thereof Thin film capacitor and fabrication method thereof

2005-06-21

2005-06-21

Dinkins, Anthony (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S311000, C361S303000, C438S239000

Reexamination Certificate

active

06909592

ABSTRACT:
The present invention is directed to a method for fabricating a thin film capacitor of a metal/insulator/metal (MIM) structure, which is capable of enabling small-sizing of a semiconductor device while maintaining electrostatic capacity of a capacitor. The method comprises the steps of: forming a heterogeneous film on a lower insulation film on a structure of a semiconductor substrate; forming a plurality of projections by selectively etching the heterogeneous film; and forming a first electrode layer, a dielectric layer, and a second electrode layer on the lower insulation including the plurality of projections in order along a surface shape of the projections such that a plurality of projecting parts are formed in the first electrode layer, the dielectric layer and the second electrode layer, respectively.

REFERENCES:
patent: 5339212 (1994-08-01), Geffken et al.
patent: 5907470 (1999-05-01), Kita et al.
patent: 6159793 (2000-12-01), Lou
patent: 6271084 (2001-08-01), Tu et al.
patent: 6387775 (2002-05-01), Jang et al.
patent: 6426250 (2002-07-01), Lee et al.
patent: 6436787 (2002-08-01), Shih et al.
patent: 6750087 (2004-06-01), Morita et al.

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