Microelectrical mechanical structure (MEMS) optical...

Details Microelectrical mechanical structure (MEMS) optical... Microelectrical mechanical structure (MEMS) optical...

2005-11-22

2005-11-22

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S621000, C359S622000

Reexamination Certificate

active

06967761

ABSTRACT:
A microelectrical mechanical out-of-plane thermal buckle-beam actuator is capable of providing transverse-plane movement of shutters. The actuator includes a pair of structural anchors secured to a substrate and one or more thermal buckle-beams secured at respective base ends to the anchors. Each buckle-beam extends substantially parallel to and spaced-apart from the substrate and is releasable from the substrate at points other than at the anchors. The thermal buckle-beam actuators are suitable for use in a microelectrical mechanical optical display system.

REFERENCES:
patent: 3071036 (1963-01-01), McKnight et al.
patent: 4157861 (1979-06-01), Davies
patent: 4421381 (1983-12-01), Ueda et al.
patent: 5061914 (1991-10-01), Busch et al.
patent: 5062689 (1991-11-01), Koehler
patent: 5084044 (1992-01-01), Quint
patent: 5099352 (1992-03-01), Yamamoto et al.
patent: 5276545 (1994-01-01), Daun et al.
patent: 5342140 (1995-02-01), Ezra et al.
patent: 5455706 (1995-10-01), Brotz
patent: 5469291 (1995-11-01), Plesko
patent: 5481396 (1996-01-01), Ji et al.
patent: 5504629 (1996-04-01), Lim
patent: 5543956 (1996-08-01), Nakagawa et al.
patent: 5612736 (1997-03-01), Vogeley et al.
patent: 5619177 (1997-04-01), Johnson et al.
patent: 5666226 (1997-09-01), Ezra et al.
patent: 5671083 (1997-09-01), Conner et al.
patent: 5700897 (1997-12-01), Klainer et al.
patent: 5748172 (1998-05-01), Song et al.
patent: 5781331 (1998-07-01), Carr et al.
patent: 5784189 (1998-07-01), Bozler et al.
patent: 5870007 (1999-02-01), Carr et al.
patent: 5969710 (1999-10-01), Doherty et al.
patent: 5994816 (1999-11-01), Dhuler et al.
patent: 6023121 (2000-02-01), Dhuler et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6108118 (2000-08-01), Minamoto
patent: 6122089 (2000-09-01), Minamoto et al.
patent: 6130464 (2000-10-01), Carr
patent: 6137623 (2000-10-01), Roberson et al.
patent: 6188504 (2001-02-01), Murakami et al.
patent: 6220730 (2001-04-01), Hewlett et al.
patent: 6229684 (2001-05-01), Cowen et al.
patent: 6236491 (2001-05-01), Goodwin-Johansson
patent: 6246504 (2001-06-01), Hagelin et al.
patent: 6249370 (2001-06-01), Takeuchi et al.
patent: 6259548 (2001-07-01), Tsugai et al.
patent: 6275325 (2001-08-01), Sinclair
patent: 6333583 (2001-12-01), Mahadevan et al.
patent: 6367251 (2002-04-01), Wood
patent: 6422011 (2002-07-01), Sinclair
patent: 6438954 (2002-08-01), Goetz et al.
patent: 6531947 (2003-03-01), Weaver et al.
patent: 6535311 (2003-03-01), Lindquist
patent: 6567295 (2003-05-01), Taussig et al.
patent: 6587612 (2003-07-01), Mitchell et al.
patent: 6672724 (2004-01-01), Peterson et al.
patent: 6708491 (2004-03-01), Weaver et al.
patent: 6708492 (2004-03-01), Sinclair
patent: 6775048 (2004-08-01), Starkweather et al.
patent: 6785039 (2004-08-01), Wedland, Jr.
patent: 6804959 (2004-10-01), Sinclair
patent: 2003/0164814 (2003-09-01), Starkweather et al.
patent: 2004/0218292 (2004-11-01), Huibers
patent: 0 774 681 (1997-05-01), None
patent: 0 831 252 (1998-03-01), None
patent: 0 778 657 (2001-09-01), None
patent: 1 201 602 (2002-05-01), None
patent: 1 289 273 (2003-03-01), None
patent: 0 692 729 (2003-04-01), None
patent: 1 341 025 (2003-09-01), None
patent: 1 143 467 (2004-09-01), None
patent: 2 703 475 (1994-10-01), None
patent: 2 749 693 (1997-12-01), None
patent: 10-39239 (1998-02-01), None
patent: WO 98/35258 (1998-08-01), None
patent: WO 99/36825 (1999-07-01), None
patent: WO 00/67268 (2000-11-01), None
patent: WO 00/73839 (2000-12-01), None
patent: WO 01/42844 (2001-06-01), None
patent: WO 01/45120 (2001-06-01), None
patent: WO 01/84531 (2001-11-01), None
Chang, C. et al., “Innovative Micromachined Microwave Switch with Very Low Insertion Loss”,Sensors and Actuators,2000, 71-75.
Chen, R.T. et al., “A Low Voltage Micromachined Optical Switch by Stress-Induced Bending”,Micro Electro Mechanical Systems,1999, 424-428, XP 010321766.
Chiao, M. et al., “Self-Buckling of Micromachined Beams Under Resistive Heating”,Journal of Microelectromechanical Systems,Mar. 2000, 9(1), 1057-7157.
Hagelin, P.M. et al., “Optical Raster-Scanning Displays Based on Surface-Micromachined Polysilicon Mirrors”,IEEE Journal of Selected Topics in Quantum Electronics,Jan. 1999, 5(1), 67-74 XP000823390.
Lee, J.Y. et al., “A Characterization of the Thermal Parameters of Thermally Driven Polysilicon Microbridge Actuators Using Electrical Impedance Analysis”,Sensors and Actuators,May 1999, 75(1)(4), 86-92, XP004147068.
Miller, D.C. et al., “Micromachined, Flip-Chip Assembled, Actuatable Contacts for Use in High Density Interconnection in Electronics Packaging”,Sensors and Actuators,2001, 89, 76-87.
Noworolski, J.Mark. et al., “Process for In-Plane and Out-of-Plane Single-Crystal-Silicon thermal Microactuators”,Sensors and Actuators,1996, 55, 65-69.
Seki, T. et al., “Thermal Buckling Actuator for Micro Relays”,Transducers,1997, 1153-1156.
Sinclair, M.J., “1D and 2D Scanning Mirrors Using Thermal Buckle-Beam Actuation”,Proceedings of the SPIE,Dec. 2001, 4592(17), 307-314, XP 009010263.
Sinclair, M.J., “A High Force Low Area MEMS Thermal Actuator”,The 7thIntersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems,May 2000, 127-132, XP010510393.
Sinclair, M. “A High Frequency Resonant Scanner Using Thermal Actuation”,Technical Digest, 15thInternational Conference on Micro Electro Mechanical Systems,Jan. 2002, 698-701.

Affiliated with

Also associated with

Rating

Microelectrical mechanical structure (MEMS) optical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microelectrical mechanical structure (MEMS) optical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectrical mechanical structure (MEMS) optical... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3509054