Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field
Reexamination Certificate
2005-02-22
2005-02-22
Nelms, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Magnetic field
C369S119000, C257S052000, C257S254000, C257S415000, C257S419000
Reexamination Certificate
active
06858911
ABSTRACT:
A Microelectromechanical (MEMS) device that can minimize the effects of fabrication tolerances on the operation of the device can include a MEMS electromagnetic actuator to selectively generate displacement forces to displace an actuable element along a path. A cantilever can apply an opposing force to the actuable element to control the amount of displacement. Coil ends of the actuator can be shaped to vary a gap distance between the coil ends, and/or the magnetic portion of the actuable element may be shaped, so as to vary the force applied to the actuable element along the displacement axis. One or more pins located in the deflection path of the cantilever can contact the cantilever at one or more points so as to change the bending resistance of the cantilever. The cross-section of the cantilever can also be varied along its length so as to change the bending resistance of the cantilever.
REFERENCES:
patent: 5206983 (1993-05-01), Guckel et al.
patent: 5327033 (1994-07-01), Guckel et al.
patent: 5629918 (1997-05-01), Ho et al.
patent: 5644177 (1997-07-01), Guckel et al.
patent: 5778513 (1998-07-01), Miu et al.
patent: 5808384 (1998-09-01), Tabat et al.
patent: 5909078 (1999-06-01), Wood et al.
patent: 5929542 (1999-07-01), Ohnstein et al.
patent: 5994816 (1999-11-01), Dhuler et al.
patent: 6044056 (2000-03-01), Wilde et al.
patent: 6085016 (2000-07-01), Espindola et al.
patent: 6087743 (2000-07-01), Guckel et al.
patent: 6122149 (2000-09-01), Zhang et al.
patent: 6137941 (2000-10-01), Robinson
patent: 6163643 (2000-12-01), Bergmann et al.
patent: 6166478 (2000-12-01), Yi et al.
patent: 6171886 (2001-01-01), Ghosh et al.
patent: 6173105 (2001-01-01), Aksyuk et al.
patent: 6222954 (2001-04-01), Riza
patent: 6246826 (2001-06-01), O'Keefe et al.
patent: 6255757 (2001-07-01), Dhuler et al.
patent: 6262463 (2001-07-01), Miu et al.
patent: 6265239 (2001-07-01), Aksyuk et al.
patent: 6275320 (2001-08-01), Dhuler et al.
patent: 6285504 (2001-09-01), Diemeer
patent: 6300619 (2001-10-01), Aksyuk et al.
patent: 6308631 (2001-10-01), Smith et al.
patent: 6324748 (2001-12-01), Dhuler et al.
patent: 6327855 (2001-12-01), Hill et al.
patent: 1 081722 (2001-03-01), None
patent: 1 164 601 (2001-12-01), None
patent: WO 0005734 (2000-02-01), None
International Search Report dated Apr. 2, 2004 and completed on Apr. 21, 2004.
Bhansali et al., “Prototype Feedback-Controlled Bidirectional Actuation System for MEMS Applications,” Journal of Microelectromechanical Systems, 9 (2): 245-251 (Jun. 2000).
Stephen Cohen, “Novel VOAs Provide More Speed and Utility,” Laser Focus World, pp. 139-146 (Nov. 2000).
Christenson and Guckel, “An Electromagnetic Micro Dynamometer,” 1995 IEEE MEMS Proceedings, Amsterdam, the Netherlands, pp. 386-391, Jan. 29-Feb. 2, 1995.
Gong and Zhou, “Micromachined Electromagnetic Actuator,” Proceedings of the International Symposium on Test & Measurement, ISTM. pp. 23-26 (1999).
Guckel et al., “Laterally Driven Electromagnetic Actuators,” Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, pp. 49-52 (Jun. 13-16,1994).
Guckel et al., “Design and Testing of Planar Magnetic Micromotors Fabricated by Deep X-Ray Lithography and Electroplating,” The 7thInternational Conference on Solid-State Sensors and Actuators, Yokohama, Japan, pp. 76-79, (Jun. 7-10, 1993).
Guckel et al., “Fabrication and Testing of the Planar Magnetic Micromotor,” J. Micromech. Microeng. 1: 135-138, (1991).
Guckel et al., “Electromagnetic, Spring Constrained Linear Actuator with Large Throw,” Actuator'94, pp. 52-55, (Bremen, Germany Jun. 15-17, 1994).
Guckel et al., “Micromechanics for Actuators Via Deep X-Ray Lithography,” SPIE vol. 2194, pp. 2-10.
Guckel et al., “Processing and Design Considerations for High Force Output—Large Throw Electrostatics, Linear Microactuators,” Actuator 94, Bremen, Germany pp. 105-108, (Jun. 15-17, 1994) (Abstract).
H. Guckel and University of Wisconsin, Madison, “Photograph of Actuator,” online, retrieved on Feb. 1, 2002 from URL http://mems.engr.wisc.edu/images/linear/intgrated_coil.jpg.
Guckel et al., “Micro Electromagnetic Actuators Based on Deep X-Ray Lithography,” International Symposium on Microsystems, Intelligent Materials and Robots, Sendai, Japan, Sep. 27-29, (1995) (Abstract).
Miyajima et al., “A Durable, Shock-Resistant Electromagnetic Optical Scanner with Polyimide-Based Hinges,” Journal of Microelectromechanical Systems 10 (3): 418-424, (Sep. 2001).
Ohnstein et al., “Tunable IR Filters with Integral Electromagnetic Actuators,” Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, pp. 196-199, (Jun. 2-6, 1996).
Sadler et al., “A Universal Electromagnetic Microactuator Using Magnetic Interconnection Concepts,” Journal of Microelectromechanical Systems 9(4): 460-468, (Dec. 2000).
Sadler et al., “A New Electromagnetic Actuator Using Through-Hole Plating of Nickel/ Iron Permalloy,” Electrochemical Society Proceedings vol. 98(20): 377-388.
Wright et al., “A Large—Force, Fully-Integrated MEMS Magnetic Actuator,” Transducers 97, International Conference on Solid-State Sensors and Actuators, pp. 793-796, (Chicago, Jun. 16-19, 1997).
Borski Justin C.
Neal Matthew J.
Sidman Alan L.
Tamura Hirokazu
Advanced Micriosensors
Foley & Hoag LLP
Furukawa American, Inc.
Nelms David
Tran Mai-Huong
LandOfFree
MEMS actuators does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with MEMS actuators, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS actuators will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3508248