Method and apparatus to facilitate separation of a mask and...

Details Method and apparatus to facilitate separation of a mask and... Method and apparatus to facilitate separation of a mask and...

2005-11-01

2005-11-01

Fuller, Rodney (Department: 2851)

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Detailed holder for original

C355S030000, C355S072000

Reexamination Certificate

active

06961119

ABSTRACT:
A method and apparatus to facilitate separation of a mask and mask platform is described. That method and apparatus comprises a temperature differential device that provides a temperature differential between a mask and a mask platform. The temperature differential facilitates separation of the mask and the mask platform.

REFERENCES:
patent: 4202623 (1980-05-01), Watkin
patent: 6653639 (2003-11-01), Novak

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