Method and apparatus for controlling the operation of a...

Gas separation: processes – With control responsive to sensed condition – Pressure sensed

Reexamination Certificate

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C095S023000, C096S252000, C096S253000, C110S203000

Reexamination Certificate

active

06926756

ABSTRACT:
A method and system to control the operation of a scrubber, in which, the system includes a valve to control the flow of an exhaust from a tool, a sensor to determine whether the valve is open or closed and a controller to control the operation of the scrubber depending on whether the valve is open or closed.

REFERENCES:
patent: 1792590 (1931-02-01), Kirk
patent: 3364660 (1968-01-01), Rebours
patent: 3726065 (1973-04-01), Hausberg et al.
patent: 3785126 (1974-01-01), Smitherman
patent: 3967937 (1976-07-01), Hobbs
patent: 3993460 (1976-11-01), Gooch et al.
patent: 4178158 (1979-12-01), Yoshida et al.
patent: 5531801 (1996-07-01), Sewell et al.
patent: 5639430 (1997-06-01), Myers et al.
patent: 62-23423 (1987-01-01), None

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