Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate
2005-11-22
2005-11-22
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
C355S067000, C355S071000, C430S005000
Reexamination Certificate
active
06967707
ABSTRACT:
A corrective filter for use in an optical system to correct a defect in a reticle and/or pellicle. The corrective filter may be positioned between a light source and the reticle, between the reticle and a wafer, or in combination with the reticle and/or pellicle. The invention provides a method of characterizing the optical properties of the corrective filter in a photolithography system.
REFERENCES:
patent: 4588293 (1986-05-01), Axelrod
patent: 5055871 (1991-10-01), Pasch
patent: 5142132 (1992-08-01), MacDonald et al.
patent: 5486896 (1996-01-01), Hazama et al.
patent: 5521033 (1996-05-01), Okamoto
patent: 5640233 (1997-06-01), McArthur et al.
patent: 5642183 (1997-06-01), Sugihara et al.
patent: 5767949 (1998-06-01), Noguchi et al.
patent: 5795685 (1998-08-01), Liebmann et al.
patent: 5828455 (1998-10-01), Smith et al.
patent: 5838433 (1998-11-01), Hagiwara
patent: 6115108 (2000-09-01), Capodieci
patent: 6151103 (2000-11-01), Shu et al.
patent: 6235434 (2001-05-01), Sweeney et al.
patent: 6346979 (2002-02-01), Ausschnitt et al.
Fuller Rodney
Knobbe Martens Olson & Bear LLP
Micro)n Technology, Inc.
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