Semiconductor device having first and second type field effect t

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357 43, 357 44, 357 46, 357 48, 357 88, H01L 2702, H01L 2704

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051384205

ABSTRACT:
A complementary field effect element develops an intensified latch-up preventive property even if the distance between the emitters of parasitic transistors is short, and a method of producing the same are disclosed. The complementary field effect element includes a high concentration impurity layer (16) formed by ion implantation in the boundary region between a P-well (2) and an N-well (3) which are formed adjacent each other on the main surface of a semiconductor substrate (1). Therefore, carriers passing through the boundary region between the P-well (2) and the N-well (3) are decreased, so that even if the distance between the emitters (4, 5) of parasitic transistors is short, there is obtained an intensified latch-up preventive property.

REFERENCES:
patent: 4786960 (1988-11-01), Jeuch
patent: 4805008 (1989-02-01), Yao et al.
Cheung et al., "Buried Dopant and Defect Layers For Device Structures With High-Energy Ion Implantation", Nuclear Instruments and Methods in Physics Research, (1989), pp. 941-950.

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