Fishing – trapping – and vermin destroying
Patent
1991-08-02
1993-03-16
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 11, 437 12, 437 62, 148DIG60, H01L 21306
Patent
active
051943956
ABSTRACT:
A substrate has a semiconductor-on-insulator structure. The substrate has a base substrate, an insulator layer provided on the base substrate, an active substrate provided on the insulator layer and having gettering sites, and an active layer provided on the active substrate and made of a semiconductor. The gettering sites under the active layer eliminate crystal defects and impurities generated in the active layer during the semiconductor device production in which elements are formed in the active layer.
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"Gettering Technique Resulting in Defect-Free Devices", M. R. Poponiak and T. H. Yeh, IBM Technical Disclosure Bulletin, vol. 16, No. 4, Sep. 1973, p. 1023.
Dang Trung
Fujitsu Limited
Hearn Brian E.
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