Pattern transfer device using PC projector

Details Pattern transfer device using PC projector Pattern transfer device using PC projector

2005-11-22

2005-11-22

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S067000

Reexamination Certificate

active

06967708

ABSTRACT:
A projection exposure apparatus comprising: a display device having a reflection-type or transmission-type display portion on which a predetermined image to be exposed is displayed; a stage for holding a substrate to be exposed; and a telecentric-type projection lens for projecting the predetermined image displayed on the display portion onto the surface of the substrate held on the stage.

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patent: 6379867 (2002-04-01), Mei et al.
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patent: 6628390 (2003-09-01), Johnson
patent: 6818389 (2004-11-01), Fritze et al.
patent: 1-308021 (1989-12-01), None
patent: 2-192710 (1990-07-01), None
patent: 7-183210 (1995-07-01), None
patent: 8-8161 (1996-01-01), None

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