Pressure transducer

Details Pressure transducer Pressure transducer

2005-08-02

2005-08-02

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S725000, C073S756000, C257S419000

Reexamination Certificate

active

06923068

ABSTRACT:
One aspect is a pressure transducer package comprising a housing, a diaphragm, a support disposed in the housing and a sensing element disposed in the housing between the diaphragm and the support so that the pressure from the environment acts on the diaphragm to compress the sensing element. The sensing element comprises at least one substrate having a coefficient of thermal expansion greater than 4 ppm/k. In another aspect, the sensing element comprises at least one substrate formed of a first material and an epitaxial layer of a second material having a lower coefficient of thermal expansion. In a further aspect, the support abuts the housing at a spherically-shaped interface to compensate for misalignment between the support and the sensing element to ensure that the sensing element is evenly loaded.

REFERENCES:
patent: 4016437 (1977-04-01), Calderara et al.
patent: 4056009 (1977-11-01), Sonderegger et al.
patent: 4059999 (1977-11-01), Engeler et al.
patent: 4061035 (1977-12-01), Witzke et al.
patent: 4127840 (1978-11-01), House
patent: 4148530 (1979-04-01), Calderara
patent: 4314481 (1982-02-01), Wolfer et al.
patent: 4341974 (1982-07-01), Calderara
patent: 4379405 (1983-04-01), Engeler et al.
patent: 4503351 (1985-03-01), Sonderegger et al.
patent: 4519254 (1985-05-01), Sonderegger et al.
patent: 4559821 (1985-12-01), Engeler et al.
patent: 4570097 (1986-02-01), Shukla et al.
patent: 4645965 (1987-02-01), Paganelli
patent: 4679438 (1987-07-01), Wareham
patent: 4680972 (1987-07-01), Wareham
patent: 4683757 (1987-08-01), Adams et al.
patent: 4702113 (1987-10-01), Wareham
patent: 4712430 (1987-12-01), Wareham
patent: 4735091 (1988-04-01), Engeler et al.
patent: 4800760 (1989-01-01), Wolfer et al.
patent: 4819487 (1989-04-01), Wareham
patent: 4829827 (1989-05-01), Wareham
patent: 4843887 (1989-07-01), Engeler et al.
patent: 4858471 (1989-08-01), Wareham
patent: 4974454 (1990-12-01), Wolfer et al.
patent: 4982608 (1991-01-01), Märki et al.
patent: 4986129 (1991-01-01), Ruckenbauer et al.
patent: 4996878 (1991-03-01), Kübler
patent: 5024107 (1991-06-01), Bethe
patent: 5088329 (1992-02-01), Sahagen
patent: 5095741 (1992-03-01), Bartig et al.
patent: 5138885 (1992-08-01), Okauchi et al.
patent: 5142914 (1992-09-01), Kusakabe et al.
patent: 5168192 (1992-12-01), Kosugi et al.
patent: 5181417 (1993-01-01), Nishida et al.
patent: 5186055 (1993-02-01), Kovacich et al.
patent: 5199303 (1993-04-01), Benedikt et al.
patent: 5209119 (1993-05-01), Polla et al.
patent: 5249468 (1993-10-01), Benedikt et al.
patent: RE34441 (1993-11-01), Ruckenbauer et al.
patent: 5347841 (1994-09-01), Enzinna
patent: 5360331 (1994-11-01), Wareham
patent: 5440932 (1995-08-01), Wareham
patent: 5461922 (1995-10-01), Koen
patent: 5503023 (1996-04-01), Benedikt et al.
patent: 5515732 (1996-05-01), Willcox et al.
patent: 5583295 (1996-12-01), Nagase et al.
patent: 5602339 (1997-02-01), Wareham
patent: 5670722 (1997-09-01), Moser et al.
patent: 5703296 (1997-12-01), Little et al.
patent: 5709337 (1998-01-01), Moser et al.
patent: 5824910 (1998-10-01), Last et al.
patent: 5852320 (1998-12-01), Ichihashi
patent: 6066882 (2000-05-01), Kato
patent: 6092426 (2000-07-01), Vollenweider et al.
patent: 6229190 (2001-05-01), Bryzek et al.
patent: 6487898 (2002-12-01), Haefner et al.
patent: 6550337 (2003-04-01), Wagner et al.
patent: 2004/0118216 (2004-06-01), Reinhart et al.
patent: 0336437 (1989-10-01), None
patent: 0352773 (1990-01-01), None
patent: 0855585 (1998-07-01), None
patent: 0 855 585 (1998-07-01), None
Search Report and Written Opinion from International Application No. PCT/US2004/016145, mailed Jan. 28, 2005.

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