Stage control apparatus, exposure apparatus, and device...

Details Stage control apparatus, exposure apparatus, and device... Stage control apparatus, exposure apparatus, and device...

2005-06-07

2005-06-07

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C318S560000

Reexamination Certificate

active

06903806

ABSTRACT:
A stage control apparatus for controlling a motion of a stage. The apparatus includes a filter unit which eliminates a resonance frequency component contained in an input signal and outputs a control signal for controlling a motion of the stage, a generating unit which generates a frequency spectrum of a motion signal concerning a motion of the stage, a calculating unit which calculates coefficients of the filter unit based on the frequency spectrum, and a setting unit which sets the coefficients calculated by the calculation unit as the coefficients of the filter unit.

REFERENCES:
patent: 5165047 (1992-11-01), Shimizu
patent: 5184055 (1993-02-01), Ohishi et al.
patent: 5404418 (1995-04-01), Nagano
patent: 5475291 (1995-12-01), Yoshida et al.
patent: 5936710 (1999-08-01), Itoh et al.
patent: 6160612 (2000-12-01), Itoh et al.
patent: 5-19858 (1993-01-01), None
patent: 5-35335 (1993-02-01), None
patent: 5-114141 (1993-05-01), None
patent: 5-159492 (1993-06-01), None

Affiliated with

Also associated with

Rating

Stage control apparatus, exposure apparatus, and device... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage control apparatus, exposure apparatus, and device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage control apparatus, exposure apparatus, and device... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3502055