Method of making a pressure transducer apparatus

Details Method of making a pressure transducer apparatus Method of making a pressure transducer apparatus

1994-04-07

1996-06-11

Simmons, David A.

Plastic and nonmetallic article shaping or treating: processes

Pore forming in situ

By mechanically introducing gas into material

156 89, 156233, 264 61, 264 62, 264 65, 264 66, 73718, 73724, 3612834, B32B 3112, B32B 3126, C04B 3332, G01L 912

Patent

active

055252800

ABSTRACT:
A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.

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