Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-08-23
2005-08-23
Letscher, Geraldine (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S322000
Reexamination Certificate
active
06933082
ABSTRACT:
It is an object of the present invention to provide a photomask equipped with a dust-proofing device which has high ultraviolet transmittance in a short wavelength region and high light resistance and is free from the necessity of the substitution with inert gas and also to, provide an exposure method using this photomask. The photomask equipped with a dust-proofing device is produced by overlapping a ultraviolet ray-transmittable transparent substrate on the side of the light-shading film pattern surface of the photomask to apply the photomask to the transparent substrate tightly by exhausting and removing the air present between the photomask and the transparent substrate. A transparent film which transmits ultraviolet rays maybe formed on the surface of the photomask on the side of a light-shading film pattern surface and a ultraviolet ray-transmittable transparent substrate may be overlapped on the transparent film to apply the photomask to the transparent substrate tightly by exhausting and removing the air present between the transparent film and the transparent substrate.
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Mason, Kenneth, Reusable Pellicle for 1X Masks, Reserch Disclosure, Kenneth Mason Publications, Hampshire, GB, NR. 259, Page(s) 588 XP000835966, ISSN: 0374-4353.
Motonaga Toshiaki
Nakagawa Hiro-o
Dai Nippon Printing Co. Ltd.
Keefer Timothy J.
Letscher Geraldine
Seyfarth Shaw LLP
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