Atomic beam to protect a reticle

Details Atomic beam to protect a reticle Atomic beam to protect a reticle

2005-12-06

2005-12-06

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100

Reexamination Certificate

active

06972420

ABSTRACT:
Embodiments of the invention provide a beam generator to produce an atomic beam that travels across a patterned surface of a reticle. The beam may interact with particles to prevent the particles from contaminating the reticle.

REFERENCES:
patent: 6204509 (2001-03-01), Yahiro et al.
patent: 6621090 (2003-09-01), Simizu
patent: 6635402 (2003-10-01), Yahiro

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