Method and apparatus for particle removal

Details Method and apparatus for particle removal Method and apparatus for particle removal

2005-08-02

2005-08-02

Evans, Geoffrey S. (Department: 1725)

Electric heating

Metal heating

By arc

C219S121690

Reexamination Certificate

active

06924456

ABSTRACT:
Numerous embodiments of method and apparatus for particle removal are disclosed. Some embodiments include a laser source and a substrate with a surface, the substrate having a layer of liquid partially covering the top surface and at least one particle on the substrate surface, the laser source configured to deliver one or more laser pulses to the substrate surface proximate to the at least one particle at an angle of incidence that is acute with respect to the substrate surface.

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