Electric heating – Metal heating – By arc
Reexamination Certificate
2005-02-01
2005-02-01
Heinrich, Samuel M. (Department: 1725)
Electric heating
Metal heating
By arc
C219S121600, C219S121750
Reexamination Certificate
active
06849825
ABSTRACT:
A footprint (an area on a plane necessary for processing) of a laser irradiation apparatus for moving a stage supporting thereon a substrate in X and Y direction becomes unavoidably large when the substrate becomes greater in size, and the apparatus becomes very great as a whole. In a laser irradiation apparatus of the invention, a galvanomirror or a polygon mirror irradiates and scans a laser beam to and on a semiconductor film and always keeps an angle θ of incidence of the laser beam to the semiconductor film at a certain angle.
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Specification, claims, abstract and drawings of U.S. Appl. No. 10/252,828 entitledLaser Irradiation Method and Laser Irradiation Device and Method of Manufacturing Semiconductor Devicefiled Sep. 24, 2002.
Specification, claims, abstract and drawings of U.S. Appl. No. 10/207,769 entitledLaser Irradiating Device, Laser Irradiating Method and Manufacturing Method of Semiconductor Devicefiled Jul. 31, 2002.
Heinrich Samuel M.
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
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