Vacuum sensor

Details Vacuum sensor Vacuum sensor

2005-11-15

2005-11-15

Cygan, Michael (Department: 2855)

Measuring and testing

Instrument proving or calibrating

Gas or liquid analyzer

C073S023200, C702S087000, C702S100000

Reexamination Certificate

active

06964187

ABSTRACT:
An apparatus and method for measuring the vapor or gas content of a vacuum chamber (1) by a vapor sensor (21) located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sensor using the vacuum pump (25) and them referencing the sensor response to the chamber gas during the evacuation cycle.

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