Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-11-15
2005-11-15
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06965435
ABSTRACT:
Disclosed is an interferometer that enables high-speed and high-precision measurement of a surface shape of an article and a method of producing such interferometer. Also disclosed is a method of measuring a surface shape of an article by use of such interferometer. The interferometer includes an optical system having an optical element being effective to make, into an aspherical wave, a wavefront of light to be projected on the article to be inspected, and also being arranged to be replaceable by another optical element.
REFERENCES:
patent: 4725144 (1988-02-01), Nelson et al.
patent: 5485275 (1996-01-01), Ohtsuka
patent: 5500767 (1996-03-01), Maruyama et al.
patent: 5563706 (1996-10-01), Shibuya et al.
patent: 5818632 (1998-10-01), Stephenson
patent: 5986760 (1999-11-01), Nakayama et al.
patent: 6184994 (2001-02-01), Freischlad
patent: 6714307 (2004-03-01), De Groot et al.
patent: 6774982 (2004-08-01), Ouchi
patent: 6785006 (2004-08-01), Nishida
patent: 2002/0176090 (2002-11-01), Ohsaki et al.
patent: 2003/0011783 (2003-01-01), Suzuki et al.
patent: 198 22 453 (1999-12-01), None
patent: 2000-097665 (2000-07-01), None
Lyons Michael A.
Toatley , Jr. Gregory J.
LandOfFree
Interferometer system for measuring surface shape does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Interferometer system for measuring surface shape, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometer system for measuring surface shape will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3491794