Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1991-01-25
1992-02-04
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
359370, H01J 314, G02B 2106
Patent
active
050862227
ABSTRACT:
A scanning type microscope includes a coherent light source, a condenser for condensing rays of light supplied from the coherent light source on an object, and a phase member disposed between the coherent light source and the condenser, the phase member having first and second phase areas to provide a desired phase difference on the wave front of the rays of light reaching the object. The microscope further includes an objective for guiding the rays of light coming from the object, a photodetector arrangement which separately detects light from a first of two optical path areas respectively corresponding to the first phase area of the phase member and the second phase area of the phase member, and a scanning arrangement for relatively moving the object and the position at which the rays of light are condensed by the condenser. A phase pattern on the object diffracts light from the second phase area into the optical path area corresponding to the first phase area. The diffracted light interferes with light from the first phase area, thus enabling detection of the phase pattern by contrast.
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Wilson et al., Theory and Practice of Scanning Optical Microscopy, Academic Press 1984, pp. 79-93, 100-110.
Messinger Michael
Nelms David C.
Nikon Corporation
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