Inspection method and inspection apparatus

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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06850080

ABSTRACT:
There is established an easier inspection method with which it is not required to set up probes on wires. Also, there is provided an inspection apparatus using this inspection method. With the inspection apparatus or inspection method, primary coils of an inspection substrate and secondary coils of a device substrate are superimposed on each other so that a certain space is maintained therebetween. An AC signal is inputted into the primary coils, thereby generating an electromotive force in each secondary coil by electromagnetic induction. Then, each circuit provided on the device substrate is driven using the electromotive force and information possessed by an electromagnetic wave or electric field generated in this circuit is monitored, thereby detecting each defective spot.

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patent: 20020173060 (2002-11-01), Hiroki
patent: 2000-258482 (2000-09-01), None
Aoshima, S. et al, “Improvement of the Minimum Detectability of Electro-Optic Sampling by Using a Structurally New Probe,” OSA Proceedings on Picosecond Electronics and Optoelectronics, vol. 9, pp. 64-69, 1991.
Takahashi, H. et al, “Improvement of Space-Dependent Sensitivity and Absolute Voltage Measurement in Noncontract Picosecond Electro-Optic Sampling,” OSA Proceedings on Picosecond Electronics and Optoelectronics, vol. 9, pp. 70-74, 1991.
Aoshima, S. et al, “Internal Test of MMIC with E-O Sampling,” 1993 Mircowave Workshops and Exhibition, Microwave Workshop Digest, pp. 77-82, 1993.
Hui, S.Y. et al, “Coreless Printed Circuit Board (PCB) Transformers—Fundamental Characteristics and Application Potential,” IEEE Circuits and Systems, vol. 11, No. 3, pp. 3-15, Third Quarter, 2000.
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