Inspection method and apparatus for testing fine pitch traces

Details Inspection method and apparatus for testing fine pitch traces Inspection method and apparatus for testing fine pitch traces

2005-10-04

2005-10-04

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S686000, C324S690000

Reexamination Certificate

active

06952104

ABSTRACT:
An inspection apparatus and method are disclosed. The inspection apparatus comprises a probe30having a width equal to or less than that of the layout pitch of conductive patterns15to be inspected, and a sensor section20having an area capable of covering the layout region of the conductive patterns. The probe30is adapted to be scanningly moved across an inspection-signal supply region including respective portions of the conductive patterns. The sensor section20is positioned opposed to the conductive patterns15.An AC inspection signal is fed from an AC power source35to the probe30to form a capacitive coupling between one electrode or the conductive pattern, and the other electrode or the sensor section20,and a detected signal from the sensor section20is amplified through an amplifier25to check the detected signal. Then, it is determined if each of the conductive patterns supplied with the inspection signal includes a short-circuit, according to whether the level of the detected signal is different from a signal level in a normal state. The present invention can provide an inspection apparatus and method capable of readily detecting a short-circuit possibly existing in various conductive patterns, in a simple control.

REFERENCES:
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patent: 4656416 (1987-04-01), Brasfield
patent: 5138266 (1992-08-01), Stearns
patent: 5256975 (1993-10-01), Mellitz et al.
patent: 6160409 (2000-12-01), Nurioka

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