Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2005-08-09
2005-08-09
Hail, III, Joseph J. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S006000, C451S296000, C451S288000
Reexamination Certificate
active
06926585
ABSTRACT:
A pressure control system is used for eliminating individual differences of a plurality of pressure controllers used for controlling pressures of a plurality of pressure-controlled sections. The pressure control system includes a plurality of pressure controllers for supplying a pressurized fluid to a plurality of pressure-controlled sections, a master pressure controller for supplying a pressurized fluid having a reference pressure, a plurality of calibration chambers corresponding to the pressure controllers. The pressure control system further includes differential-pressure detecting devices provided in the calibration chambers to detect a differential pressure between the pressurized fluid supplied from the master pressure controller and the pressurized fluid supplied from the pressure controller, and an arithmetic device configured to receive a signal from the differential-pressure detecting device and adjust an output of the pressure controller so that the above differential pressure becomes zero or approximately zero.
REFERENCES:
patent: 5762539 (1998-06-01), Nakashiba et al.
patent: 6129613 (2000-10-01), Bothra
patent: 6241578 (2001-06-01), Togawa et al.
patent: 6275290 (2001-08-01), Cerni et al.
patent: 6594542 (2003-07-01), Williams
patent: 6857947 (2005-02-01), Wang et al.
patent: 2004/105112 (2004-12-01), None
Ebara Corporation
Hail III Joseph J.
Ojini Anthony
Wenderoth , Lind & Ponack, L.L.P.
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