Optically stimulated electron emission contamination monitor...

Details Optically stimulated electron emission contamination monitor... Optically stimulated electron emission contamination monitor...

2005-02-15

2005-02-15

Niebling, John F. (Department: 2812)

Optics: measuring and testing

By light interference

Having polarization

Reexamination Certificate

active

06856403

ABSTRACT:
An apparatus and method for performing quality inspections on a test surface based on optically stimulated emission of electrons. In one embodiment, the apparatus comprises a device for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface, and circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and for indicating a condition of quality based on the generated signal indicative of the photoelectron current. In one embodiment, the method comprises producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines and directing the selected spectrum line to the test surface, detecting a current of photoelectrons emitted from the test surface and generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of the photoelectron current.

REFERENCES:
patent: 5393980 (1995-02-01), Yost et al.
patent: 6480285 (2002-11-01), Hill

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