Laser irradiation apparatus, laser irradiation method, and...

Electric heating – Metal heating – By arc

Reexamination Certificate

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C219S121850

Reexamination Certificate

active

06852947

ABSTRACT:
At edges of laser light on an irradiation surface or in the vicinity thereof, the energy density is attenuated gradually due to aberration of a lens or the like. Since such regions (attenuation regions) do not have enough energy density for annealing of an irradiation object, uniform annealing of the irradiation object is not possible.In the present invention, one of the plural laser beams is divided into two laser beams so that each section of the two laser beams serves as an edge of the resultant laser light. Each attenuation region of the two laser beams is synthesized with an attenuation region of another laser beam. In this way, laser light every part of which has an energy density suitable for satisfactory annealing of an irradiation object can be obtained from plural laser beams having attenuation regions.

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U.S. Appl. No. 10/279,960 filed Oct. 25, 2002 is being submitted as related information for the above application being filed.

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