Nanometer-scale structures and lithography

Details Nanometer-scale structures and lithography Nanometer-scale structures and lithography

1991-07-16

1992-08-11

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

2504922, 430296, 369126, 346158, H01J 37305

Patent

active

051381745

ABSTRACT:
Improved fabrication processes for preparation of nanometer scale structures wherein a polymeric coating is applied to the substrate prior to fabrication are disclosed.

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Wichramasinghe, H. K., Scientific American, pp. 98-105 (Oct. 1989).
Hansma, P. K. et al., Science, 242: 209-216 (1988).
Foster, J. S. et al., Nature, 331: 324-326 (Jan. 28, 1988).
Miller, J. A. et al., J. Appl. Phys., 68(2), pp. 905-907 (Jul. 15, 1990).
Albrecht, T. R. et al., Appl. Phys. Lett., 55(17), pp. 1727-1729 (Oct. 23, 1989).
Penner, R. M., Abstracts for STM 1990/Nano I Conference, Jul. 1990.

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