Sensor for measuring a gas concentration or ion concentration

Details Sensor for measuring a gas concentration or ion concentration Sensor for measuring a gas concentration or ion concentration

2005-08-16

2005-08-16

Olsen, Kaj K. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S431000, C257S253000, C422S082030

Reexamination Certificate

active

06929728

ABSTRACT:
The invention relates to a sensor for measuring a gas concentration or ion concentration which has a substrate (11), a drain (3) formed on the substrate, a source (2) formed on the substrate, a channel area (4) of the substrate located between drain (3) and source (2), a conductive guard ring (1) located outside the channel area, and a sensitive gate layer (8) whose potential depends on the surrounding gas or ion concentration, with an air gap (10) provided between the gate layer and channel area (4). In order to create a sensor that can be made economically and compactly which nevertheless ensures exact measurement of a change in concentration with time, it is provided that surface profiling (7and12) be formed between guard ring (1) and channel area (4).

REFERENCES:
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patent: 19849932 (2000-05-01), None
patent: 0947829 (1999-10-01), None
Gergintschew et al., “The capacitively controlled field effect transistor (CCFED) as a new low power gas sensor”, Elsevier Science S.A., B 35-36, 1996, 285-289.

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