Apparatus for planarizing microelectronic workpieces

Details Apparatus for planarizing microelectronic workpieces Apparatus for planarizing microelectronic workpieces

2005-11-29

2005-11-29

Wilson, Lee D. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S056000, C451S443000, C451S008000, C451S005000

Reexamination Certificate

active

06969306

ABSTRACT:
Planarizing machines for accurately planarizing microelectronic workpieces. Several embodiments of the planarizing machines produce a planar surface at a desired endpoint in the microelectronic workpieces by (a) quickly reducing variances on the surface of the workpiece using a planarizing medium that removes topographical features but has a low polishing rate on planar surfaces; and (b) subsequently planarizing the wafer on a planarizing medium that has a higher polishing rate on planar surfaces than the first polishing medium.

REFERENCES:
patent: 4498345 (1985-02-01), Dyer et al.
patent: 4501258 (1985-02-01), Dyer et al.
patent: 4502459 (1985-03-01), Dyer
patent: 4971021 (1990-11-01), Kubotera et al.
patent: 5036015 (1991-07-01), Sandhu et al.
patent: 5081796 (1992-01-01), Schultz
patent: 5163334 (1992-11-01), Li et al.
patent: 5222329 (1993-06-01), Yu
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5234867 (1993-08-01), Schultz et al.
patent: 5240552 (1993-08-01), Yu et al.
patent: 5244534 (1993-09-01), Yu et al.
patent: 5245790 (1993-09-01), Jerbic
patent: 5245796 (1993-09-01), Miller et al.
patent: RE34425 (1993-11-01), Schultz
patent: 5413941 (1995-05-01), Koos et al.
patent: 5421769 (1995-06-01), Schultz et al.
patent: 5433649 (1995-07-01), Nishida
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5439551 (1995-08-01), Meikle et al.
patent: 5449314 (1995-09-01), Meikle et al.
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5514245 (1996-05-01), Doan et al.
patent: 5533924 (1996-07-01), Stroupe et al.
patent: 5540810 (1996-07-01), Sandhu et al.
patent: 5573442 (1996-11-01), Morita et al.
patent: 5609718 (1997-03-01), Meikle
patent: 5618381 (1997-04-01), Doan et al.
patent: 5618447 (1997-04-01), Sandhu
patent: 5632666 (1997-05-01), Peratello et al.
patent: 5643048 (1997-07-01), Iyer
patent: 5643060 (1997-07-01), Sandhu et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5658190 (1997-08-01), Wright et al.
patent: 5663797 (1997-09-01), Sandhu
patent: 5664988 (1997-09-01), Stroupe et al.
patent: 5668061 (1997-09-01), Herko et al.
patent: 5679065 (1997-10-01), Henderson
patent: 5681204 (1997-10-01), Kawaguchi et al.
patent: 5700180 (1997-12-01), Sandhu et al.
patent: 5702292 (1997-12-01), Brunelli et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5738562 (1998-04-01), Doan et al.
patent: 5747386 (1998-05-01), Moore
patent: 5777739 (1998-07-01), Sandhu et al.
patent: 5792709 (1998-08-01), Robinson et al.
patent: 5795495 (1998-08-01), Meikle
patent: 5798302 (1998-08-01), Hudson et al.
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5816891 (1998-10-01), Woo
patent: 5830806 (1998-11-01), Hudson et al.
patent: 5842909 (1998-12-01), Sandhu et al.
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5855804 (1999-01-01), Walker
patent: 5868896 (1999-02-01), Robinson et al.
patent: 5882248 (1999-03-01), Wright et al.
patent: 5893754 (1999-04-01), Robinson et al.
patent: 5895550 (1999-04-01), Andreas
patent: 5897426 (1999-04-01), Somekh
patent: 5910846 (1999-06-01), Sandhu
patent: 5934973 (1999-08-01), Boucher et al.
patent: 5934980 (1999-08-01), Koos et al.
patent: 5936733 (1999-08-01), Sandhu et al.
patent: 5945347 (1999-08-01), Wright
patent: 5954912 (1999-09-01), Moore
patent: 5967030 (1999-10-01), Blalock
patent: 5972792 (1999-10-01), Hudson
patent: 5975994 (1999-11-01), Sandhu et al.
patent: 5980363 (1999-11-01), Meikle et al.
patent: 5981396 (1999-11-01), Robinson et al.
patent: 5994224 (1999-11-01), Sandhu et al.
patent: 5997384 (1999-12-01), Blalock
patent: 6006739 (1999-12-01), Akram et al.
patent: 6007408 (1999-12-01), Sandhu
patent: 6039633 (2000-03-01), Chopra
patent: 6040245 (2000-03-01), Sandhu et al.
patent: 6046111 (2000-04-01), Robinson
patent: 6054015 (2000-04-01), Brunelli et al.
patent: 6057602 (2000-05-01), Hudson et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6074286 (2000-06-01), Ball
patent: 6083085 (2000-07-01), Lankford
patent: 6108092 (2000-08-01), Sandhu
patent: 6110820 (2000-08-01), Sandhu et al.
patent: 6116988 (2000-09-01), Ball
patent: 6120354 (2000-09-01), Koos et al.
patent: 6125255 (2000-09-01), Litman
patent: 6135856 (2000-10-01), Tjaden et al.
patent: 6139402 (2000-10-01), Moore
patent: 6143123 (2000-11-01), Robinson et al.
patent: 6143155 (2000-11-01), Adams et al.
patent: 6152803 (2000-11-01), Boucher et al.
patent: 6152808 (2000-11-01), Moore
patent: 6176992 (2001-01-01), Talieh
patent: 6184571 (2001-02-01), Moore
patent: 6187681 (2001-02-01), Moore
patent: 6190494 (2001-02-01), Dow
patent: 6191037 (2001-02-01), Robinson et al.
patent: 6191864 (2001-02-01), Sandhu
patent: 6193588 (2001-02-01), Carlson et al.
patent: 6200901 (2001-03-01), Hudson et al.
patent: 6203404 (2001-03-01), Joslyn et al.
patent: 6203407 (2001-03-01), Robinson
patent: 6203413 (2001-03-01), Skrovan
patent: 6206754 (2001-03-01), Moore
patent: 6206756 (2001-03-01), Chopra et al.
patent: 6206769 (2001-03-01), Walker
patent: 6208425 (2001-03-01), Sandhu et al.
patent: 6210257 (2001-04-01), Carlson
patent: 6213845 (2001-04-01), Elledge
patent: 6218316 (2001-04-01), Marsh
patent: 6224466 (2001-05-01), Walker et al.
patent: 6227955 (2001-05-01), Custer et al.
patent: 6234874 (2001-05-01), Ball
patent: 6234877 (2001-05-01), Koos et al.
patent: 6234878 (2001-05-01), Moore
patent: 6237483 (2001-05-01), Blalock
patent: 6250994 (2001-06-01), Chopra et al.
patent: 6251785 (2001-06-01), Wright
patent: 6261151 (2001-07-01), Sandhu et al.
patent: 6261163 (2001-07-01), Walker et al.
patent: 6267650 (2001-07-01), Hembree
patent: 6273786 (2001-08-01), Chopra et al.
patent: 6273796 (2001-08-01), Moore
patent: 6276996 (2001-08-01), Chopra
patent: 6287172 (2001-09-01), Kuan
patent: 6287879 (2001-09-01), Gonzales et al.
patent: 6290572 (2001-09-01), Hofmann
patent: 6301006 (2001-10-01), Doan
patent: 6306012 (2001-10-01), Sabde
patent: 6306014 (2001-10-01), Walker et al.
patent: 6306768 (2001-10-01), Klein
patent: 6312558 (2001-11-01), Moore
patent: 6313038 (2001-11-01), Chopra et al.
patent: 6319420 (2001-11-01), Dow
patent: 6323046 (2001-11-01), Agarwal
patent: 6328632 (2001-12-01), Chopra
patent: 6331488 (2001-12-01), Doan et al.
patent: 6338667 (2002-01-01), Sandhu et al.
patent: 6340327 (2002-01-01), Afif
patent: 6350180 (2002-02-01), Southwick
patent: 6350691 (2002-02-01), Lankford
patent: 6352466 (2002-03-01), Moore
patent: 6354923 (2002-03-01), Lankford
patent: 6354930 (2002-03-01), Moore
patent: 6358122 (2002-03-01), Sabde et al.
patent: 6358127 (2002-03-01), Carlson et al.
patent: 6358129 (2002-03-01), Dow
patent: 6361417 (2002-03-01), Walker et al.
patent: 6362105 (2002-03-01), Moore
patent: 6364746 (2002-04-01), Moore
patent: 6364757 (2002-04-01), Moore
patent: 6368190 (2002-04-01), Easter et al.
patent: 6368193 (2002-04-01), Carlson et al.
patent: 6368194 (2002-04-01), Sharples et al.
patent: 6368197 (2002-04-01), Elledge
patent: 6376381 (2002-04-01), Sabde
patent: 6383934 (2002-05-01), Sabde et al.
patent: 6387289 (2002-05-01), Wright
patent: 6390902 (2002-05-01), Chang
patent: 6395620 (2002-05-01), Pan et al.
patent: 6402884 (2002-06-01), Robinson et al.
patent: 6413156 (2002-07-01), Shimizu
patent: 6428386 (2002-08-01), Bartlett
patent: 6431949 (2002-08-01), Ishikawa et al.
patent: 6435942 (2002-08-01), Jin et al.
patent: 6447369 (2002-09-01), Moore
patent: 6498101 (2002-12-01), Wang
patent: 6511576 (2003-01-01), Klein
patent: 6520834 (2003-02-01), Marshall
patent: 6533893 (2003-03-01), Sabde et al.
patent: 6537133 (2003-03-01), Birang et al.
patent: 6547640 (2003-04-01), Hofmann
patent: 6548407 (2003-04-01), Chopra et al.
patent: 6558229 (2003-05-01), Kimura et al.
patent: 6579799 (2003-06-01), Chopra et al.
patent: 6592443 (2003-07-01), Kramer et al.
patent: 6609947 (2003-08-01), Moore
patent: 6612901 (2003-09-01), Agarwal
patent: 6623329 (2003-09-01), Moore
patent: 6628410 (2003-09-01), Doan
patent: 6633084 (2003-10-01), Sandhu et al.
patent: 6652764 (2003-11-01), Blalock
patent: 6666749 (2003-12-01), Taylor
Kondo, S. et al., “Abrasive-Free Polishing for Copper Damascene Interconnection,” Journal of the Electrochemical Society, 200

Affiliated with

Also associated with

Rating

Apparatus for planarizing microelectronic workpieces does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for planarizing microelectronic workpieces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for planarizing microelectronic workpieces will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3482969