Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-08-30
2005-08-30
Eley, Timothy V. (Department: 3724)
Abrading
Abrading process
Glass or stone abrading
C451S059000, C451S288000, C451S495000, C451S527000, C451S550000
Reexamination Certificate
active
06935929
ABSTRACT:
Polishing machines and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces are disclosed herein. In one embodiment, a machine includes a table having a support surface, an under-pad carried by the support surface, and a workpiece carrier assembly over the table. The under-pad has a cavity and the carrier assembly is configured to carry a microfeature workpiece. The machine further includes a magnetic field source configured to generate a magnetic field in the cavity and a magnetorheological fluid in the cavity. The magnetorheological fluid changes viscosity within the cavity under the influence of the magnetic field source. It is emphasized that this Abstract is provided to comply with the rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 C.F.R §172 (b).
REFERENCES:
patent: 5020283 (1991-06-01), Tuttle
patent: 5069002 (1991-12-01), Sandhu et al.
patent: 5081796 (1992-01-01), Schultz
patent: 5177908 (1993-01-01), Tuttle
patent: 5222875 (1993-06-01), Clark
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5234867 (1993-08-01), Schultz et al.
patent: 5240552 (1993-08-01), Yu et al.
patent: 5244534 (1993-09-01), Yu et al.
patent: 5245790 (1993-09-01), Jerbic
patent: 5245796 (1993-09-01), Miller et al.
patent: RE34425 (1993-11-01), Schultz
patent: 5297364 (1994-03-01), Tuttle
patent: 5421769 (1995-06-01), Schultz et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5449314 (1995-09-01), Meikle et al.
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5514245 (1996-05-01), Doan et al.
patent: 5533924 (1996-07-01), Stroupe et al.
patent: 5540810 (1996-07-01), Sandhu et al.
patent: 5609718 (1997-03-01), Meikle
patent: 5618381 (1997-04-01), Doan et al.
patent: 5618447 (1997-04-01), Sandhu
patent: 5624303 (1997-04-01), Robinson
patent: 5643053 (1997-07-01), Shendon
patent: 5643060 (1997-07-01), Sandhu et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5658186 (1997-08-01), Perrotto et al.
patent: 5658190 (1997-08-01), Wright et al.
patent: 5664988 (1997-09-01), Stroupe et al.
patent: 5679065 (1997-10-01), Henderson
patent: 5681215 (1997-10-01), Sherwood et al.
patent: 5690540 (1997-11-01), Elliott et al.
patent: 5700180 (1997-12-01), Sandhu et al.
patent: 5702292 (1997-12-01), Brunelli et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5733176 (1998-03-01), Robinson et al.
patent: 5736427 (1998-04-01), Henderson
patent: 5738567 (1998-04-01), Manzonie et al.
patent: 5747386 (1998-05-01), Moore
patent: 5792709 (1998-08-01), Robinson et al.
patent: 5795218 (1998-08-01), Doan et al.
patent: 5795495 (1998-08-01), Meikle
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5823855 (1998-10-01), Robinson
patent: 5830806 (1998-11-01), Hudson et al.
patent: 5836807 (1998-11-01), Leach
patent: 5842909 (1998-12-01), Sandhu et al.
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5868896 (1999-02-01), Robinson et al.
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5879222 (1999-03-01), Robinson
patent: 5882248 (1999-03-01), Wright et al.
patent: 5893754 (1999-04-01), Robinson et al.
patent: 5895550 (1999-04-01), Andreas
patent: 5910043 (1999-06-01), Manzonie et al.
patent: 5916012 (1999-06-01), Pant et al.
patent: 5919082 (1999-07-01), Walker et al.
patent: 5930699 (1999-07-01), Bhatia
patent: 5931718 (1999-08-01), Komanduri et al.
patent: 5931719 (1999-08-01), Nagahara et al.
patent: 5934980 (1999-08-01), Koos et al.
patent: 5936733 (1999-08-01), Sandhu et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5945347 (1999-08-01), Wright
patent: 5954912 (1999-09-01), Moore
patent: 5967030 (1999-10-01), Blalock
patent: 5972792 (1999-10-01), Hudson
patent: 5976000 (1999-11-01), Hudson
patent: 5980363 (1999-11-01), Meikle et al.
patent: 5981396 (1999-11-01), Robinson et al.
patent: 5989470 (1999-11-01), Doan et al.
patent: 5990012 (1999-11-01), Robinson et al.
patent: 5994224 (1999-11-01), Sandhu et al.
patent: 5997384 (1999-12-01), Blalock
patent: 6036586 (2000-03-01), Ward
patent: 6039633 (2000-03-01), Chopra
patent: 6040245 (2000-03-01), Sandhu et al.
patent: 6054015 (2000-04-01), Brunelli et al.
patent: 6059638 (2000-05-01), Crevasse et al.
patent: 6062958 (2000-05-01), Wright et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6074286 (2000-06-01), Ball
patent: 6083085 (2000-07-01), Lankford
patent: 6090475 (2000-07-01), Robinson et al.
patent: 6110820 (2000-08-01), Sandhu et al.
patent: 6113467 (2000-09-01), Koike
patent: 6116988 (2000-09-01), Ball
patent: 6120354 (2000-09-01), Koos et al.
patent: 6135856 (2000-10-01), Tjaden et al.
patent: 6136043 (2000-10-01), Robinson et al.
patent: 6139402 (2000-10-01), Moore
patent: 6143123 (2000-11-01), Robinson et al.
patent: 6143155 (2000-11-01), Adams et al.
patent: 6152808 (2000-11-01), Moore
patent: 6176763 (2001-01-01), Kramer et al.
patent: 6176992 (2001-01-01), Talieh
patent: 6180525 (2001-01-01), Morgan
patent: 6186870 (2001-02-01), Wright et al.
patent: 6187681 (2001-02-01), Moore
patent: 6191037 (2001-02-01), Robinson et al.
patent: 6193588 (2001-02-01), Carlson et al.
patent: 6196899 (2001-03-01), Chopra et al.
patent: 6200901 (2001-03-01), Hudson et al.
patent: 6203404 (2001-03-01), Joslyn et al.
patent: 6203407 (2001-03-01), Robinson
patent: 6203413 (2001-03-01), Skrovan
patent: 6206754 (2001-03-01), Moore
patent: 6206756 (2001-03-01), Chopra et al.
patent: 6206759 (2001-03-01), Agarwal et al.
patent: 6210257 (2001-04-01), Carlson
patent: 6213845 (2001-04-01), Elledge
patent: 6218316 (2001-04-01), Marsh
patent: 6220934 (2001-04-01), Sharples et al.
patent: 6224466 (2001-05-01), Walker et al.
patent: 6227955 (2001-05-01), Custer et al.
patent: 6234868 (2001-05-01), Easter et al.
patent: 6234874 (2001-05-01), Ball
patent: 6234877 (2001-05-01), Koos et al.
patent: 6234878 (2001-05-01), Moore
patent: 6237483 (2001-05-01), Blalock
patent: 6244944 (2001-06-01), Elledge
patent: 6250994 (2001-06-01), Chopra et al.
patent: 6251785 (2001-06-01), Wright
patent: 6254460 (2001-07-01), Walker et al.
patent: 6261151 (2001-07-01), Sandhu et al.
patent: 6261163 (2001-07-01), Walker et al.
patent: 6267650 (2001-07-01), Hembree
patent: 6273786 (2001-08-01), Chopra et al.
patent: 6273796 (2001-08-01), Moore
patent: 6273800 (2001-08-01), Walker et al.
patent: 6276996 (2001-08-01), Chopra
patent: 6277015 (2001-08-01), Robinson et al.
patent: 6284660 (2001-09-01), Doan
patent: 6290579 (2001-09-01), Walker et al.
patent: 6296557 (2001-10-01), Walker
patent: 6297159 (2001-10-01), Paton
patent: 6306012 (2001-10-01), Sabde
patent: 6306014 (2001-10-01), Walker et al.
patent: 6306768 (2001-10-01), Klein
patent: 6309282 (2001-10-01), Wright et al.
patent: 6312558 (2001-11-01), Moore
patent: 6313038 (2001-11-01), Chopra et al.
patent: 6325702 (2001-12-01), Robinson
patent: 6328632 (2001-12-01), Chopra
patent: 6331135 (2001-12-01), Sabde et al.
patent: 6331139 (2001-12-01), Walker et al.
patent: 6331488 (2001-12-01), Doan et al.
patent: 6338667 (2002-01-01), Sandhu et al.
patent: 6350180 (2002-02-01), Southwick
patent: 6350691 (2002-02-01), Lankford
patent: 6352466 (2002-03-01), Moore
patent: 6354919 (2002-03-01), Chopra
patent: 6354923 (2002-03-01), Lankford
patent: 6354928 (2002-03-01), Crevasse et al.
patent: 6354930 (2002-03-01), Moore
patent: 6358118 (2002-03-01), Boehm et al.
patent: 6358122 (2002-03-01), Sabde et al.
patent: 6358127 (2002-03-01), Carlson et al.
patent: 6358129 (2002-03-01), Dow
patent: 6361400 (2002-03-01), Southwick
patent: 6361417 (2002-03-01), Walker et al.
patent: 6361832 (2002-03-01), Agarwal et al.
patent: 6364749 (2002-04-01), Walker
patent: 6364757 (2002-04-01), Moore
patent: 6368190 (2002-04-01), Easter et al.
patent: 6368193 (2002-04-01), Carlson et al.
patent: 6368194 (2002-04-01), Sharples et al.
patent: 6368197 (2002-04-01), Elledge
patent: 6376381 (2002-04-01), Sabde
patent: 6387289 (2002-05-01), Wright
patent: 6402884 (2002-06-01), Robinson et al.
patent: 6402978 (2002-06-01), Levin
patent: 6409586 (2002-06-01), Walker et al.
patent: 6436828 (2002-08-01), Chen et al.
pa
Eley Timothy V.
Micro)n Technology, Inc.
Perkins Coie LLP
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