Illumination optical system and exposure apparatus having...

Details Illumination optical system and exposure apparatus having... Illumination optical system and exposure apparatus having...

2005-02-22

2005-02-22

Cariaso, Alan (Department: 2875)

Illumination

Light source and modifier

Plural serial lens elements or components

C362S235000, C362S259000, C362S554000, C385S033000

Reexamination Certificate

active

06857764

ABSTRACT:
An illumination optical system includes a luminous intensity distribution converting optical system for converting an illuminance distribution of a light source image into a luminous intensity distribution upon a predetermined plane, a light transmitting element having its light entrance surface disposed substantially in coincidence with the predetermined plane, and a light collecting optical system for defining an illumination region upon a surface to be illuminated, by use of light from the light transmitting element.

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Stroke, George W., “An Introduction to Coherent Optics and Holography”, Jan. 1966, Academic Press Inc., pp. 26-29, 118-119, 164-165.

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