Plastic and nonmetallic article shaping or treating: processes – Direct application of electrical or wave energy to work – Polymerizing – cross-linking – or curing
Reexamination Certificate
2005-08-23
2005-08-23
Tentoni, Leo B. (Department: 1732)
Plastic and nonmetallic article shaping or treating: processes
Direct application of electrical or wave energy to work
Polymerizing, cross-linking, or curing
C216S011000, C216S052000, C264S040100, C264S259000, C264S293000, C264S338000
Reexamination Certificate
active
06932934
ABSTRACT:
The present invention is directed to methods for patterning a substrate by imprint lithography. An imprint lithography method includes placing a curable liquid on a substrate. A template may be contacted with the curable liquid. Surface forces at the interface of the curable liquid and the template cause the curable liquid to gather in an area defined by a lower surface of the template. Alternately, the curable liquid may fill one or more relatively shallow recesses in the template and the area under the template lower surface. Activating light is applied to the curable liquid to form a patterned layer on the substrate.
REFERENCES:
patent: 3783520 (1974-01-01), King
patent: 3807027 (1974-04-01), Heisler
patent: 3807029 (1974-04-01), Troeger
patent: 3811665 (1974-05-01), Seelig
patent: 4062600 (1977-12-01), Wyse
patent: 4070116 (1978-01-01), Frosch et al.
patent: 4098001 (1978-07-01), Watson
patent: 4119688 (1978-10-01), Hiraoka
patent: 4155169 (1979-05-01), Drake et al.
patent: 4201800 (1980-05-01), Alcorn et al.
patent: 4202107 (1980-05-01), Watson
patent: 4267212 (1981-05-01), Sakawaki
patent: 4337579 (1982-07-01), De Fazio
patent: 4355469 (1982-10-01), Nevins et al.
patent: 4414750 (1983-11-01), De Fazio
patent: 4426247 (1984-01-01), Tamamura et al.
patent: 4440804 (1984-04-01), Milgram
patent: 4451507 (1984-05-01), Beltz et al.
patent: 4507331 (1985-03-01), Hiraoka
patent: 4544572 (1985-10-01), Sandvig et al.
patent: 4552833 (1985-11-01), Ito et al.
patent: 4600309 (1986-07-01), Fay
patent: 4610442 (1986-09-01), Oku et al.
patent: 4657845 (1987-04-01), Frechet et al.
patent: 4692205 (1987-09-01), Sachdev et al.
patent: 4694703 (1987-09-01), Routson
patent: 4707218 (1987-11-01), Giammarco et al.
patent: 4731155 (1988-03-01), Napoli et al.
patent: 4737425 (1988-04-01), Lin et al.
patent: 4763886 (1988-08-01), Takei
patent: 4808511 (1989-02-01), Holmes
patent: 4826943 (1989-05-01), Ito et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4857477 (1989-08-01), Kanamori
patent: 4891303 (1990-01-01), Garza et al.
patent: 4908298 (1990-03-01), Hefferon et al.
patent: 4919748 (1990-04-01), Bredbenner et al.
patent: 4921778 (1990-05-01), Thackeray et al.
patent: 4929083 (1990-05-01), Brunner
patent: 4931351 (1990-06-01), McColgin et al.
patent: 4959252 (1990-09-01), Bonnebat et al.
patent: 4964945 (1990-10-01), Calhoun
patent: 4976818 (1990-12-01), Hashimoto et al.
patent: 4980316 (1990-12-01), Huebner
patent: 4999280 (1991-03-01), Hiraoka
patent: 5053318 (1991-10-01), Gulla et al.
patent: 5071694 (1991-12-01), Uekita et al.
patent: 5072126 (1991-12-01), Progler
patent: 5074667 (1991-12-01), Miyatake
patent: 5108875 (1992-04-01), Thackeray et al.
patent: 5110514 (1992-05-01), Soane
patent: 5126006 (1992-06-01), Cronin et al.
patent: 5148036 (1992-09-01), Matsugu et al.
patent: 5148037 (1992-09-01), Suda et al.
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5169494 (1992-12-01), Hashimoto et al.
patent: 5173393 (1992-12-01), Sezi et al.
patent: 5179863 (1993-01-01), Uchida et al.
patent: 5198326 (1993-03-01), Hashimoto et al.
patent: 5204739 (1993-04-01), Domenicali
patent: 5212147 (1993-05-01), Sheats
patent: 5234793 (1993-08-01), Sebald et al.
patent: 5240550 (1993-08-01), Boehnke et al.
patent: 5240878 (1993-08-01), Fitzsimmons et al.
patent: 5242711 (1993-09-01), DeNatale et al.
patent: 5244818 (1993-09-01), Jokerst et al.
patent: 5314772 (1994-05-01), Kozicki et al.
patent: 5318870 (1994-06-01), Hartney
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5328810 (1994-07-01), Lowrey et al.
patent: 5330881 (1994-07-01), Sidman et al.
patent: 5348616 (1994-09-01), Hartman et al.
patent: 5362606 (1994-11-01), Hartney et al.
patent: 5366851 (1994-11-01), Novembre
patent: 5374454 (1994-12-01), Bickford et al.
patent: 5376810 (1994-12-01), Hoenk et al.
patent: 5380474 (1995-01-01), Rye et al.
patent: 5392123 (1995-02-01), Marcus et al.
patent: 5417802 (1995-05-01), Obeng
patent: 5421981 (1995-06-01), Leader et al.
patent: 5422295 (1995-06-01), Choi et al.
patent: 5424549 (1995-06-01), Feldman
patent: 5425964 (1995-06-01), Southwell et al.
patent: 5431777 (1995-07-01), Austin et al.
patent: 5439766 (1995-08-01), Day et al.
patent: 5452090 (1995-09-01), Progler et al.
patent: 5453157 (1995-09-01), Jeng
patent: 5458520 (1995-10-01), DeMercurio et al.
patent: 5468542 (1995-11-01), Crouch
patent: 5480047 (1996-01-01), Tanigawa et al.
patent: 5512131 (1996-04-01), Kumar et al.
patent: 5515167 (1996-05-01), Ledger et al.
patent: 5527662 (1996-06-01), Hashimoto et al.
patent: 5545367 (1996-08-01), Bae et al.
patent: 5566584 (1996-10-01), Briganti
patent: 5633505 (1997-05-01), Chung et al.
patent: 5654238 (1997-08-01), Cronin et al.
patent: 5670415 (1997-09-01), Rust
patent: 5700626 (1997-12-01), Lee et al.
patent: 5723176 (1998-03-01), Keyworth et al.
patent: 5724145 (1998-03-01), Kondo et al.
patent: 5736424 (1998-04-01), Prybyla et al.
patent: 5743998 (1998-04-01), Park
patent: 5747102 (1998-05-01), Smith et al.
patent: 5753014 (1998-05-01), Van Rijn
patent: 5760500 (1998-06-01), Kondo et al.
patent: 5772905 (1998-06-01), Chou
patent: 5776748 (1998-07-01), Singhvi et al.
patent: 5779799 (1998-07-01), Davis
patent: 5802914 (1998-09-01), Fassler et al.
patent: 5804474 (1998-09-01), Sakaki et al.
patent: 5855686 (1999-01-01), Rust
patent: 5877036 (1999-03-01), Kawai
patent: 5877861 (1999-03-01), Ausschnitt et al.
patent: 5884292 (1999-03-01), Baker et al.
patent: 5888650 (1999-03-01), Calhoun et al.
patent: 5895263 (1999-04-01), Carter et al.
patent: 5900160 (1999-05-01), Whitesides et al.
patent: 5907782 (1999-05-01), Wu
patent: 5912049 (1999-06-01), Shirley
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5942871 (1999-08-01), Lee
patent: 5948219 (1999-09-01), Rohner
patent: 5948470 (1999-09-01), Harrison et al.
patent: 5948570 (1999-09-01), Kornblit et al.
patent: 5952127 (1999-09-01), Yamanaka
patent: 6033977 (2000-03-01), Gutsche et al.
patent: 6035805 (2000-03-01), Rust
patent: 6038280 (2000-03-01), Rossiger et al.
patent: 6039897 (2000-03-01), Lochhead et al.
patent: 6046056 (2000-04-01), Parce et al.
patent: 6051345 (2000-04-01), Huang
patent: 6074827 (2000-06-01), Nelson et al.
patent: 6091485 (2000-07-01), Li et al.
patent: 6096655 (2000-08-01), Lee et al.
patent: 6125183 (2000-09-01), Jiawook et al.
patent: 6128085 (2000-10-01), Buermann et al.
patent: 6143412 (2000-11-01), Schueller et al.
patent: 6150231 (2000-11-01), Muller et al.
patent: 6150680 (2000-11-01), Eastman et al.
patent: 6168845 (2001-01-01), Fontana, Jr. et al.
patent: 6180239 (2001-01-01), Whitesides et al.
patent: 6204922 (2001-03-01), Chalmers
patent: 6218316 (2001-04-01), Marsh
patent: 6245213 (2001-06-01), Olsson et al.
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6274294 (2001-08-01), Hines
patent: 6326627 (2001-12-01), Putvinski et al.
patent: 6329256 (2001-12-01), Ibok
patent: 6334960 (2002-01-01), Willson et al.
patent: 6337262 (2002-01-01), Pradeep et al.
patent: 6361831 (2002-03-01), Sato et al.
patent: 6383928 (2002-05-01), Eissa
patent: 6387783 (2002-05-01), Furukawa et al.
patent: 6388253 (2002-05-01), Su
patent: 6391798 (2002-05-01), DeFelice et al.
patent: 6407340 (2002-06-01), Wikstrom et al.
patent: 6423207 (2002-07-01), Heidari et al.
patent: 6455411 (2002-09-01), Jiang et al.
patent: 6482742 (2002-11-01), Chou
patent: 6489068 (2002-12-01), Kye
patent: 6514672 (2003-02-01), Tsai et al.
patent: 6517977 (2003-02-01), Resnick et al.
patent: 6534418 (2003-03-01), Plat et al.
patent: 6541360 (2003-04-01), Plat et al.
patent: 6561706 (2003-05-01), Singh et al.
patent: 6565928 (2003-05-01), Sakamoto et al.
patent: 6632742 (2003-10-01), Yang et al.
patent: 6635581 (2003-10-01), Wong
patent: 6646662 (2003-11-01), Nebashi et al.
patent: 6677252 (2004-01-01), Marsh
patent: 6703190 (2004-03-01), Elian et al.
patent: 6716767 (2004-04-01), Shih et al.
patent: 6730256 (2004-05-01), Bloomstein et al.
patent: 6737202 (2004-05-01), Gehoski et al.
patent: 6743713 (2004-06-01), Mukherjee-Roy et al.
patent: 6767983 (2004-07-01), Fujiyama et al.
patent: 6770852 (2004-08-01), Steger
patent: 67760
Choi Byung Jin
Meissl Mario J.
Sreenivasan Sidlagata V.
Watts Michael P. C.
Brooks Kenneth C.
Molecular Imprints, Inc.
Tentoni Leo B.
LandOfFree
Formation of discontinuous films during an imprint... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Formation of discontinuous films during an imprint..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Formation of discontinuous films during an imprint... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3477889