Robotic method of transferring workpieces to and from...

Details Robotic method of transferring workpieces to and from... Robotic method of transferring workpieces to and from...

2005-02-08

2005-02-08

Eley, Timothy V (Department: 3724)

Abrading

Abrading process

C414S744500, C451S041000, C451S054000, C451S067000, C451S339000

Reexamination Certificate

active

06852007

ABSTRACT:
An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be processed. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an index table. A transfer apparatus having wafer carrier elements picks up wafers from the index table, moves the wafers to a polishing table for polishing, and returns the wafers to the index table for further processing. A flipper moves the polished wafers to a cleaning station. The cleaning station includes scrub stations, a rinsing station and a spin dryer station, and a connective system of water tracks. A wet end-effector of the robot transfers rinsed wafers to the spin dryer station. The dry end-effector of the robot moves dried wafers from the spin dryer station back to the cassette of origination.

REFERENCES:
patent: 3939514 (1976-02-01), Cook
patent: 4141180 (1979-02-01), Gill, Jr. et al.
patent: 4313266 (1982-02-01), Tam
patent: 4653231 (1987-03-01), Cronkhite et al.
patent: 4680893 (1987-07-01), Cronkhite et al.
patent: 4811522 (1989-03-01), Gill, Jr.
patent: 4851101 (1989-07-01), Hutchinson
patent: 5203360 (1993-04-01), Nguyen et al.
patent: 5213451 (1993-05-01), Frank et al.
patent: 5329732 (1994-07-01), Karlsrud et al.
patent: 5333413 (1994-08-01), Hashimoto
patent: 5357645 (1994-10-01), Onodera
patent: 5361545 (1994-11-01), Nakamura
patent: 5442828 (1995-08-01), Lutz
patent: 5498196 (1996-03-01), Karlsrud et al.
patent: 5498199 (1996-03-01), Karlsrud et al.
patent: 5522965 (1996-06-01), Chisholm et al.
patent: 5542874 (1996-08-01), Chikaki
patent: 5565034 (1996-10-01), Nanbu et al.
patent: 5616063 (1997-04-01), Okumura et al.
patent: 5618227 (1997-04-01), Tsutsumi et al.
patent: 5655949 (1997-08-01), Clover
patent: 5655954 (1997-08-01), Oishi et al.
patent: 5692947 (1997-12-01), Talieh et al.
patent: 5707274 (1998-01-01), Kim et al.
patent: 5950327 (1999-09-01), Peterson et al.
patent: 5954888 (1999-09-01), Gupta et al.
patent: 6057662 (2000-05-01), McAndrew et al.
patent: 6082949 (2000-07-01), Rosenquist
patent: 6089630 (2000-07-01), Watanabe
patent: 6227946 (2001-05-01), Gonzalez-Martin et al.
patent: 6275744 (2001-08-01), Yoshida
patent: 6360144 (2002-03-01), Bacchi et al.
patent: 6481956 (2002-11-01), Hofmeister
patent: 0 412 796 (1991-02-01), None
patent: 0 761 387 (1997-03-01), None
patent: 0 793 261 (1997-09-01), None
patent: 0 795 892 (1997-09-01), None
patent: 0 803 328 (1997-10-01), None
patent: 0 806 265 (1997-11-01), None
patent: 0 807 492 (1997-11-01), None
patent: 2-250324 (1990-10-01), None
patent: WO 9531309 (1995-11-01), None
patent: WO 9617711 (1996-06-01), None

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