Variable tunable range MEMS capacitor

Details Variable tunable range MEMS capacitor Variable tunable range MEMS capacitor

2005-12-27

2005-12-27

Pham, Hoai (Department: 2891)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C257S602000

Reexamination Certificate

active

06980412

ABSTRACT:
The invention relates to a variable capacitor and method of making it. The variable capacitor comprises a fixed charge plate disposed in a substrate, a movable charge plate disposed above the fixed charge plate, and a stiffener affixed to the movable charge plate. The movable charge plate may be patterned to form a movable actuator plate where the fixed charge plate is elevated above a fixed actuator plate.

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International Search Report, PCT/US 01/02202, Jan. 22, 2001.

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