Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Reexamination Certificate
2005-06-21
2005-06-21
Lamb, Brenda A. (Department: 1734)
Coating apparatus
Work holders, or handling devices
Gripper or clamped work type
C034S068000, C034S078000, C118S052000, C118S066000, C118S069000
Reexamination Certificate
active
06908512
ABSTRACT:
A substrate holder has a disk-like body with a central recess having diameter smaller than the diameter of the substrate placed onto the upper surface of the holder. The substrate can be clamped in place by the clamps of the edge-grip mechanism or placed into a seat without the use of clamps. In both cases, the substrate forms a partial wall that confines the heating/cooling recess or chamber. The aforementioned recess is filled with a cooling or heating liquid (depending on the mode of metal deposition) selectively supplied from a liquid heating or cooling system. In order to ensure in the working chamber above the substrate a pressure slightly higher than the pressure in the cooling/heating recess, the working chamber is first filled with the working solution under the atmospheric pressure, and then the recess is filled with a heating or cooling liquid with simultaneous increase of pressure in the working chamber to a level slightly exceeding the pressure in the recess. The substrate holder of the invention provides direct heat/cool-exchange between the heating/cooling medium and the substrate and allows instantaneous change of temperature of the heating/cooling liquid.
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Ivanov Igor C.
Kolics Artur
Zhang Jonathan Weiguo
Blue29 LLC
Daffer McDaniel LLP
Lamb Brenda A.
Leitang Mollie E.
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