Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2005-10-11
2005-10-11
Tokar, Michael (Department: 2819)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S133000
Reexamination Certificate
active
06954121
ABSTRACT:
An apparatus such as a thin film resonator has a bottom electrode, a top electrode, and a composite layer between the two electrodes. The composite layer includes a piezoelectric (PZ) layer having a first coupling coefficient and a coupling coefficient control (CCC) layer having a second coupling coefficient. By varying the relative thicknesses of the PZ layer and the CCC layer during the manufacturing process, the coupling coefficient of the resonator can be established (to any value between the first coupling coefficient and the second coupling coefficient) with minimal impact on resonant frequency. Further, it is relatively less difficult to fabricate the PZ layer and the CCC layer having the desired coupling coefficient (as a combination of the first coupling coefficient and the second coupling coefficient) compared to the difficulties of fabrication of a uniform PZ layer having the desired coupling coefficient.
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Bradley Paul D.
Larson, III John D.
Oshmyansky Yury
Yu Benjamin
Agilent Technologie,s Inc.
Nguyen Linh V
Tokar Michael
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