Semiconductor device inspection system

Details Semiconductor device inspection system Semiconductor device inspection system

2005-11-29

2005-11-29

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

With measuring or testing

C324S1540PB, C700S121000

Reexamination Certificate

active

06969620

ABSTRACT:
A device inspection apparatus inspects a plurality of semiconductor devices on an individual device basis. An inspection target sorting part (8) omits an execution of an inspection to be applied to the semiconductor devices according to information which specifies a defective device that has been determined to be defective in a manufacturing process that has been applied to the device.

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patent: 5654632 (1997-08-01), Ohno
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patent: 7-302819 (1995-11-01), None
patent: 11-330184 (1999-11-01), None
patent: 00/14790 (2000-03-01), None

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