Electric heating – Metal heating – By arc
Reexamination Certificate
2005-08-02
2005-08-02
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121520, C219S121430, C219S121480, C219S121540, C315S111510, C204S298310
Reexamination Certificate
active
06924455
ABSTRACT:
A material processing apparatus having an integrated toroidal plasma source is described. The material processing apparatus includes a plasma chamber that comprises a portion of an outer surface of a process chamber. A transformer having a magnetic core surrounds a portion of the plasma chamber. The transformer has a primary winding. A solid state AC switching power supply comprising one or more switching semiconductor devices is coupled to a voltage supply and has an output that is coupled to the primary winding. The solid state AC switching power supply drives an AC current in the primary winding that induces an AC potential inside the chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and dissociates the gas.
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Chen Xing
Holber William M.
Smith Donald K.
Applied Science & Technology, Inc.
Paschall Mark
Prokauer Rose LLP
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