Process for forming a coating on a substrate using a silsesquiox

Details Process for forming a coating on a substrate using a silsesquiox Process for forming a coating on a substrate using a silsesquiox

1991-04-29

1992-02-04

Lusignan, Michael

Coating processes

With post-treatment of coating or coating material

Heating or drying

427 96, B08D 302

Patent

active

050858939

ABSTRACT:
The present invention provides a relatively simple synthesis procedure for the formation of silane hydrolyzate compositions of the formula ##STR1## where R is hydrogen or a methyl group, n is an integer greater than about 8, and x is a number between 0 and 2. The hydrolyzate compositions are metastable in solvent solution, but become insoluble after coating on a substrate. The resins are useful as planarizing coatings for substrates such as electronic devices and can be ceramified by subjecting them to an oxidizing atmosphere at a temperature of between about 100.degree. to 1000.degree. C. to form ceramic or ceramic-like coatings on such substrates.

REFERENCES:
patent: 4382109 (1983-05-01), Olson et al.
patent: 4753855 (1988-06-01), Haluska et al.

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