Metal working – Piezoelectric device making
Reexamination Certificate
2005-08-09
2005-08-09
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S592100, C029S602100, C029S609000, C029S417000, C029S830000, C310S321000, C310S328000, C310S330000, C310S331000, C264S434000, C083S029000, C083S035000, C083S036000, C083S050000
Reexamination Certificate
active
06925693
ABSTRACT:
A method of fabricating a piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion includes a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element formed on at least a part of the outer surface of at least one of the thin plate portions. A ceramic green laminate including at least one ceramic green sheet constituting one of the thin plates and at least one ceramic green sheet having at least one hole formed thereon is formed. The ceramic green laminate is sintered to produce a ceramic laminate. A piezoelectric/electrostrictive element is formed by a film formation method on the outer surface of the thin plate portion of the ceramic laminate. The ceramic laminate is then cut with the piezoelectric/electrostrictive element formed thereon.
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Hirota Toshikazu
Kimura Koji
Nanataki Tsutomu
Takeuchi Yukihisa
Burr & Brown
Kim Paul D
NGK Insulators Ltd.
Tugbang A. Dexter
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