Method and apparatus for manufacturing a diffraction grating zon

Details Method and apparatus for manufacturing a diffraction grating zon Method and apparatus for manufacturing a diffraction grating zon

1995-06-29

1997-04-22

Epps, Georgia Y.

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Radiation beam modification of or by storage medium

369112, 430321, 359566, G02B 518

Patent

active

056234732

ABSTRACT:
An apparatus of this invention has an objective lens for guiding an exposure beam emitted by a light source toward a first region on a rotary table, a lighting light source for irradiating lighting light in the direction of the first region via the objective lens, an image pickup device for picking up an image from the first region obtained via the objective lens, modulation means for changing the propagating direction of the exposure beam, and a controller for controlling the modulation means on the basis of a signal input from the image pickup device.

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