System and method for holding a device with minimal deformation

Details System and method for holding a device with minimal deformation System and method for holding a device with minimal deformation

2005-05-03

2005-05-03

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S072000, C355S075000, C355S053000

Reexamination Certificate

active

06888620

ABSTRACT:
A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder24and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20). Additionally, the stage assembly (10) can include a fluid connector (94) that connects the device holder (24) in fluid communication with the device table (20).

REFERENCES:
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patent: 6124923 (2000-09-01), Horikawa
patent: 6420475 (2002-07-01), Chen
patent: 6570645 (2003-05-01), Korenaga et al.
patent: 20010019250 (2001-09-01), Lee
patent: 20020126923 (2002-09-01), Usui
patent: 2002-50560 (2002-02-01), None
U.S. patent application Ser. No. 09/919,940, Takahashi, filed Aug. 2, 2001, Stage Unit, Measurement Unit and Measurement Method, and Exposure Apparatus and Exposure Method.
U.S. patent application Ser. No. 09/635,339, Shiraishi et al., filed Aug. 9, 2000, Adjusting Method for Position Detecting Apparatus.

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