Stage system

Details Stage system Stage system

2005-02-22

2005-02-22

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S075000, C355S077000, C318S647000

Reexamination Certificate

active

06859257

ABSTRACT:
A stage system includes a movable stage, a force applying mechanism for applying, by use of an electromagnet, a force to the stage in a direction of a magnetic flux generated by the electromagnet, a moving mechanism for moving the electromagnet in the direction, and a controller for controlling one of the magnetic force of the electromagnet and a generated force thereof.

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