Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate
2005-08-09
2005-08-09
Brooke, Michael S. (Department: 2853)
Incremental printing of symbolic information
Ink jet
Ejector mechanism
Reexamination Certificate
active
06926390
ABSTRACT:
The invention includes a method of forming mixed-phase compressive tantalum thin films using nitrogen residual gas. The method of the present invention may include selecting a pressure of nitrogen residual gas during plasma sputtering corresponding to a predefined ratio of beta- to alpha-tantalum. The method may be performed at substrate temperatures less than 300° C. Mixed-phase compressive tantalum thin films and fluid ejection devices are also disclosed.
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Brooke Michael S.
Hewlett--Packard Development Company, L.P.
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