Independently controllable shutters and variable area apertures

Details Independently controllable shutters and variable area apertures Independently controllable shutters and variable area apertures

1996-03-04

1998-01-27

Moses, R. L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 54, 362321, G03B 2772

Patent

active

057126984

ABSTRACT:
New types of apertures to vary the size and shape of the aperture area without the need to change the whole aperture plate in off axis lithography. The off axis illumination apertures allow the size and shape of apertures to be changed without having to change the aperture plates for each step in the lithographic process. The aperture plate is fitted with simple shutter mechanisms that allow the ready adjustment of the aperture openings.

REFERENCES:
patent: 3854816 (1974-12-01), Fujimura
patent: 3980407 (1976-09-01), Hill
patent: 4208100 (1980-06-01), Bischl
patent: 4450578 (1984-05-01), Hill
patent: 4458303 (1984-07-01), Berns
patent: 4816876 (1989-03-01), Pryor
patent: 5053934 (1991-10-01), Krebs
patent: 5161176 (1992-11-01), Ebinuma et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5264898 (1993-11-01), Kamon et al.

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