Ink-jet recording head, manufacturing method of the same,...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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Reexamination Certificate

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06929355

ABSTRACT:
An ink-jet recording head is provided which possesses a stable ink ejection characteristic obtained by controlling a film thickness of a vibrating plate easily and reliably, a method of manufacturing the same, and an ink-jet recording apparatus. The ink-jet recording head having a passage-forming substrate on which pressure generating chambers communicating with nozzle orifices are defined, and a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode, which are provided on the passage-forming substrate while interposing a vibrating plate therebetween. Etching adjustment layers each having etching selectivity with the lower electrode film and the piezoelectric layer, are provided at least between the piezoelectric layer and the lower electrode as well as the vibrating plate in the vicinity of both end portions in the width direction of the piezoelectric element.

REFERENCES:
patent: 6443566 (2002-09-01), Watanabe et al.
patent: 6688731 (2004-02-01), Fujii et al.
patent: 6692114 (2004-02-01), Takahashi
patent: 05286131 (1993-11-01), None
patent: 08-058088 (1996-03-01), None
patent: 2001-298219 (2001-10-01), None

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