Fluidic device with integrated capacitive micromachined...

Details Fluidic device with integrated capacitive micromachined... Fluidic device with integrated capacitive micromachined...

2005-02-15

2005-02-15

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

By measuring vibrations or acoustic energy

C073S597000

Reexamination Certificate

active

06854338

ABSTRACT:
The present invention provides fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluid characteristics such as pressure, density, viscosity, flow rate and can also be used to mix and pump fluids.

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Calmes, S., et al., “Highly Integrated 2-D Capacitive Micromachined Ultrasonic Transducers,”IEEE Ultrasonics Symposium, 1999, 1163-1166.

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