Positioning apparatus

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

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Details

C355S030000

Reexamination Certificate

active

06954258

ABSTRACT:
A positioning apparatus for performing position of a target object in a vacuum atmosphere. The apparatus includes a first structure, a second structure which is movable relative to the first structure and supports the target object, a radiation plate, which is arranged on the first structure, performing heat exchange between the radiation plate and the second temperature by utilizing radiation, and a temperature adjusting device for adjusting of a temperature of the radiation plate. The temperature adjusting device adjusts the temperature of the radiation plate to control a temperature of the second structure or the target object.

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European Search Report dated Dec. 21, 2004, issued in corresponding European patent appln. No. 02 25 5684, forwarded in a Communication dated Dec. 29, 2004.

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