Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-02-15
2005-02-15
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S310000, C250S311000, C250S398000
Reexamination Certificate
active
06855938
ABSTRACT:
An objective lens with magnetic and electrostatic focusing for an electron microscopy system is provided whose at least partially conical outer shape allows orienting an object to be imaged at a large angle range in respect of an electron beam, said objective lens exhibiting, at the same time, good optical parameters. This is enabled by a specific geometry of the lens elements. Furthermore, an examination for the simultaneous imaging and processing of an object is proposed which comprises, besides an electron microscopy system with the above-mentioned objective lens, also an ion beam processing system and an object support.
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Gnauck Peter
Hoffrogge Peter
Preikszas Dirk
Steigerwald Michael
Burns Doane Swecker & Mathis L.L.P.
Carl Zeiss NTS GmbH
Johnston Phillip A
Lee John R.
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